Displacement Sensors
nXC-1
Color Confocal Displacement
& Thickness Measurement Sensor
High-speed, precise measurement
of the surface of fine and transparent products
with various NA measuring heads
nXC-1 uses the confocal measurement principle to measure precise displacement
and thickness. It is possible to measure displacement and distance even on rough
or reflective surfaces, and various measuring points can be applied depending
on the object to be measured.
nXC-1 can use it across multiple manufacturing lines because of its high resolution
and very high-speed measurement. Real-time calibration performs
to measure products with different reflective surfaces, isolating valid signals
to increase measurement accuracy. A measuring head with various NA
is advantageous for measuring a surface with a fine surface shape
and a large inclination angle. It can measure the surface and thickness
of transparent products, and it is also possible to measure the thickness
of opaque products.
Key Features
· Various NA
(Numerical Aperture)
measuring heads
· Measurement of
micro-surface and
thickness of transparent
/opaque products
· Combined with
a vision camera, measure
x, y, z three-dimensional
coordinates and
accurately check the position.
APPLICATIONS
Wafer stage positioning
Lens curvature measurement
Glass thickness measurement
Wafer warpage measurement
Specifications
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Measuring model Measuring technology Test content Measuring data
Large-area measurement with WSI interferometers
FOV extensive application
Micro Bump Height
Monolayer membrane thickness measurement
PCB fine pattern
Processed surface roughness measurement
Sensor step-difference measurement
Free-Form Metrology
Divided inspection possible according to product curve angels
Inspection of lens and glass, and measurement of shapes
Inspection of OLED surfaces, and measurement of shapes
Inspection of wafer surfaces, and measurement of shapes
Real-time measurement of transparent and semitransparent product thickness
Applicable to multi-channels
Measurement of wafer(silicone, sapphire) thickness
Measurement of glass and film thickness