Nexensor is oriented to the future with a perfect measuring technology.
We can manufacture ultra-high-speed large-area optical systems as well as microscopic optical systems,
according to customer specifications, that can measure monolayer membrane shapes and
3D surface shapes of products with fine or narrow depth like u-bumps or fine patterns.
|FOV||12mm X 12mm||Can manufacture large-area and microscopic structures|
|Repeatable||< 0.1 um||For standard specimens|
|Measuring speed||< 0.5 sec||For 100um height|
|Inspection item||Measurement of monolayer membrane thickness and shapes, and measurement of surface shapes such as warpage, height, and so on|
It is possible to inspect the real-time 3D shapes of hard-material products with free curves.
It is possible to inspect the warpage of semiconductors, the nanometer-level dent of membrane products, and the 3D appearance of glass products.
|Equipment size||800mm X 800mm X 1500mm||WDH|
|Inspection time||< 0.5 sec|
|FOV||100mm X 100mm||Changeable|
|Inspection item||3D Warpage, Dent||Glass, Free curve|